Repeatable change in electrical resistance of Si surface by mechanical and electrical nanoprocessing
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چکیده
منابع مشابه
Repeatable change in electrical resistance of Si surface by mechanical and electrical nanoprocessing
The properties of mechanically and electrically processed silicon surfaces were evaluated by atomic force microscopy (AFM). Silicon specimens were processed using an electrically conductive diamond tip with and without vibration. After the electrical processing, protuberances were generated and the electric current through the silicon surface decreased because of local anodic oxidation. Grooves...
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ژورنال
عنوان ژورنال: Nanoscale Research Letters
سال: 2014
ISSN: 1556-276X
DOI: 10.1186/1556-276x-9-455